The Ikonic™ 3000 series of polishing pads targets processes that require medium hardness pads. It is designed to deliver step-out improvements in wafer defect levels and improved topography performance when compared to IC1000™ pads.
Benefits:
- Improved defectivity performance
- Improved topography performance
- Multiple configuration options
- Long pad lifetime
- Easily conditioned pad surface
Applications:
- Copper bulk
