The Ikonic™ 4100 series of polishing pad targets processes that require higher hardness pads. It is designed to deliver significantly lower defects in the most advanced Logic and Memory technology nodes.
Benefits:
- Step-out defectivity performance
- Improved balance in trade-offs associated with defectivity and removal rate stability over pad-life
- Easily conditioned pad surface
Applications:
- Shallow trench isolation (STI)/Ceria, interlayer dielectric (ILD), Copper bulk, Tungsten
