Qnity is the exclusive provider of Klebosol® slurries. Klebosol® slurries are the most widely used water-glass colloidal silica products for CMP of semiconductor devices, interlayer dielectrics, shallow trench isolation, polysilicon, and post-metal buff. The silica particles are grown in a liquid medium and maintain excellent stability.

Applications

Qnity’s portfolio includes long-established mature node products using Klebosol® abrasives as well as ultra-high purity abrasives for advanced node ILD needs.

Features & benefits

Slurries are designed to enable the planarization and material removal such that surface quality and material property integrity is maintained or improved.
Slurries are made up of a combination of key additives which enable precise polishing of the wafer surface.
State-of-the-art polishing slurries enable topography or flatness to be maintained at or less than 300 angstroms across a 300mm wafer.
Surface finish of materials, including corrosion sensitive metals, is maintained at the single-digit angstrom level.

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