Modular process cells and chassis construction allow for multiple plating and pretreat/post treat processes.
5 Plating stations
2 Predip stations
4 Dragout Rinse stations
2 Quick Dump Rinse stations
Plating fixture storage in tool
Ethernet interface to PPR and DC rectifiers
Reciprocating solution sparging
Plating fixtures for 100mm, 200mm, and 300mm wafer sizes
Advanced anode and cathode shielding
